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  • New method monitors semiconductor etching as it happens with light

    Sep 29, 2012 8:00 amItems

    University of Illinois researchers have a new low-cost method to carve delicate features onto semiconductor wafers using light – and watch as it happens.

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    Holonyak Micro & Nanotechnology Lab

    The Grainger College of Engineering

    208 North Wright Street

    Urbana, IL 61801

    Phone: 217-333-2300

    E-mail HMNTL

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